Mechanical Engineer Substrate Handling (all genders)

• 1 Mechanical Engineer Substrate Handling (all genders) Job-ID: 200758 I Work Location Model: On-site Flex I Arbeitsort: Salzburg I Work Country: Österreich
• What you'll do
• Substrate holder (Chuck) design

• Design and develop substrate holders (chucks) for wet chemistry processes, including plating, cleaning, and etching applications
• Define sealing concepts, panel support strategies, clamping mechanisms, and chemical exposure interfaces
• Optimize designs for uniform process conditions, minimal particle generation, and high substrate integrity (e.g. low breakage, controlled deformation)

Panel and substrate handling

• Design mechanical interfaces between substrate holders and tool automation (transfer systems, process chambers)
• Develop concepts for loading/unloading, alignment, gripping, and secure transport of panels
• Ensure safe interaction between handling systems and substrate holders to avoid damage and contamination
• Collaborate with multiple teams, e.g. automation teams on end effector and handling strategy development, and process teams on optimising process performance

Engineering development & validation

• Own full product lifecycle from concept through productization for chuck assemblies
• Perform detailed mechanical design including tolerance stack-ups, sealing interfaces, and alignment concepts
• Conduct analysis including structural, FEA, thermal effects, deformation, and vibration
• Develop and execute validation plans focusing on:

• *
• ** Chemical compatibility (materials, coatings, seals)
• ** Lifetime and wear (seals, surfaces, interfaces)
• ** Process robustness (repeatability, alignment, uniformity)

• Drive root cause analysis and design improvements for field issues (e.g., leakage, breakage, handling failures, process failures)
• Build and support testing of prototypes in lab and tool environments
• Execute test plans to evaluate performance such as sealing, leakage, and handling robustness
• Document results and support analysis of issues and design improvements

Materials & process environment

• Select and qualify materials such as polymers, elastomers (e.g., FKM/FFKM), ceramics, metals, and coatings for harsh wet chemistry environments
• Ensure compatibility with plating chemistries, acids, solvents, and DI water processes
• Design for cleanability, maintainability, and minimal chemical retention

Manufacturing & productization

• Collaborate with suppliers and manufacturing to ensure high-quality, cost-effective, and scalable designs
• Drive DFM/DFA improvements for complex assemblies such as substrate holders and handling interfaces
• Define and release complete documentation including drawings, specifications, and assembly concepts
• Perform technical design reviews and work in cross-functional project teams
• Drive standardization of substrate holder platforms and modular design concepts

Who we're looking for

Minimum qualifications

• Bachelor's or Master's degree in Mechanical Engineering or related field
• 3-5 years of experience in mechanical design or product development
• Strong experience in precision mechanical design, ideally in complex equipment or capital systems
• Proficiency in 3D CAD tools (Siemens NX, SolidEdge, or similar)
• Solid foundation in GD&T, tolerance analysis, and assembly design
• Hands-on experience in testing, debugging, and validating mechanical systems

Preferred qualifications

• Exposure to semiconductor equipment, wet processing, or plating systems
• Experience with substrate holders, chucks, or wafer/panel handling systems
• Strong understanding of:

• *
• ** Sealing technologies (static and dynamic seals)
• ** Chemical compatibility and material selection
• ** Precision alignment and handling of fragile substrates

• Experience working with automation systems

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Lam Research Salzburg GmbH

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